Optical, electrical and microstructural properties of SiC thin films deposited by reactive dc magnetron sputtering
THIN SOLID FILMS, Vol. 674, No. null, Ocak 2019, s. 1-6, ISSN: 0040-6090
TAVŞANOĞLU TOLGA,ÖZKAN ZAYİM ESRA,OKAN AĞIRSEVEN,YILDIRIM SAFFETTİN,YÜCEL ONURALP