Fabrication and flow rate characterization of a DRIE process based valveless piezoelectric micropump
Journal of Micromechanics and Microengineering, Vol. 32, No. 6, Mayıs 2022, s. 65004, ISSN: 0960-1317
ŞİMŞEK SEVDA, AHMADİ VAHİD EBRAHİMPOUR, ÇELİK SÜLEYMAN, SAYAR ERSİN, KOŞAR ALİ