A graph theoretic approach for quantification of surface morphology variation and its application to chemical mechanical planarization process
IIE Transactions, Vol. 47, No. 10, Şubat 2015, s. 1088-1111, ISSN: 0740-817X
PRAHALAD K RAO,BEYCA ÖMER FARUK,ZHENYU (JAMES) KONG,SATİSH T BUKKAPATNAM,KENNETH E CASE,RANGA KOMANDURİ