Nonlinear Sequential Bayesian Analysis Based Decision Making for End Point Detection of Chemical Mechanical Planarization CMP Processes
IEEE Transactions on Semiconductor Manufacturing, Vol. 24, No. 4, Kasım 2011, s. 523-532, ISSN: 0894-6507
ZHENYU KONG,BEYCA ÖMER FARUK,SATİSH T BUKKAPATNAM,KOMANDURİ RANGA