Optical, electrical and microstructural properties of SiC thin films deposited by reactive dc magnetron sputtering
Thin Solid Films, Vol. 674, Mart 2019, s. 1-6, ISSN: 00406090
TAVŞANOĞLU TOLGA,ÖZKAN ZAYİM ESRA,OKAN AĞIRSEVEN,YILDIRIM SAFFETTİN,YÜCEL ONURALP