Design considerations of a MEMS cantilever beamswitch for pull in under electrostatic force generated by means of vibrations
JVE International Ltd. Journal of Vibroengineering, Vol. 16, No. 3, Mayıs 2014, s. 1200-1207, ISSN: 1392-8716
AYŞE ÖZGÜL ERTANIR, İKİZOĞLU SERHAT