Streamlined cryogenic deep reactive ion etching protocol for hybrid micronozzle arrays
Journal of Micromechanics and Microengineering, Vol. 21, No. 10, Ağustos 2011, s. 105001, ISSN: 0960-1317
ERTEN AHMET CAN,MAKALE MİLAN,LU XUEKUN,FRUHBERGER BERND,KESARİ SANTOSH,ESENER SADİK